Kanta MORI

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and cleaning method of mist guard
- Patent number 12,148,632
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Yusuke Hashimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,051,605
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle, substrate processing apparatus, and substrate processing me...
- Patent number 12,007,692
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Hiroki Sakurai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE
- Publication number 20240124984
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yusuke HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...
- Publication number 20230185199
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF MIST GUARD
- Publication number 20230001458
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Yusuke Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220115249
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Nobuhiro OGATA
- H01 - BASIC ELECTRIC ELEMENTS