Kanzou KATOU

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film thickness measurement apparatus, film thickness measurement me...
- Patent number 9,355,442
- Issue date May 31, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
FILM THICKNESS MEASUREMENT APPARATUS, FILM THICKNESS MEASUREMENT ME...
- Publication number 20150324970
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING