Kao-Feng Liao

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device structure with interconnect structure and meth...
- Patent number 11,854,872
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 11,679,469
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor device structure with interconnect structure and meth...
- Patent number 11,417,566
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing method
- Patent number 11,373,879
- Issue date Jun 28, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tung-Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET contacts and method forming same
- Patent number 11,189,727
- Issue date Nov 30, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Peng-Chung Jangjian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped contact plug and method for form...
- Patent number 11,145,751
- Issue date Oct 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Ju Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polish slurry and method of manufacture
- Patent number 11,043,396
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing method
- Patent number 10,777,423
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tung-Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning module
- Patent number 9,337,066
- Issue date May 10, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Ting Yen
- B08 - CLEANING
Information Patent Grant
CMP-friendly coatings for planar recessing or removing of variable-...
- Patent number 9,281,192
- Issue date Mar 8, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Kuei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Construction of thin strain-relaxed SiGe layers and method for fabr...
- Patent number 7,202,512
- Issue date Apr 10, 2007
- Industrial Technology Research Institute
- Pang-Shiu Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE
- Publication number 20240395562
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20240087951
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Mechanical Planarization Tool
- Publication number 20230271298
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20230078573
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20220367257
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION AND METHOD FOR POLISHING AND INTEGRATED CIRCUIT
- Publication number 20220017780
- Publication date Jan 20, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY COMPOSITION AND METHOD FOR POLISHING AND INTEGRATGED CIRCUIT
- Publication number 20210371702
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Mechanical Polish Slurry and Method of Manufacture
- Publication number 20210313190
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION TOOL
- Publication number 20210053180
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Application
FINFET CONTACTS AND METHOD FORMING SAME
- Publication number 20210057571
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Peng-Chung Jangjian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20200411329
- Publication date Dec 31, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20200043777
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Mechanical Polish Slurry and Method of Manufacture
- Publication number 20200043745
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...
- Publication number 20190305107
- Publication date Oct 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Ju CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20190157103
- Publication date May 23, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP-FRIENDLY COATINGS FOR PLANAR RECESSING OR REMOVING OF VARIABLE...
- Publication number 20150262812
- Publication date Sep 17, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Wen-Kuei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING MODULE
- Publication number 20150122291
- Publication date May 7, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Ting Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Construction of thin strain-relaxed SiGe layers and method for fabr...
- Publication number 20050179028
- Publication date Aug 18, 2005
- Pang-Shiu Chen
- H01 - BASIC ELECTRIC ELEMENTS

Kao-Feng Liao

Person

Patents Grantslast 30 patents

Semiconductor device structure with interconnect structure and meth...

Chemical mechanical planarization tool

Semiconductor device structure with interconnect structure and meth...

Chemical mechanical polishing method

FinFET contacts and method forming same

Semiconductor structure with doped contact plug and method for form...

Chemical mechanical polish slurry and method of manufacture

Chemical mechanical polishing method

Wafer cleaning module

CMP-friendly coatings for planar recessing or removing of variable-...

Construction of thin strain-relaxed SiGe layers and method for fabr...

Patents Applicationslast 30 patents

CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE

Semiconductor Device Structure with Interconnect Structure and Meth...

Chemical Mechanical Planarization Tool

CHEMICAL MECHANICAL POLISHING METHOD

Semiconductor Device Structure with Interconnect Structure and Meth...

COMPOSITION AND METHOD FOR POLISHING AND INTEGRATED CIRCUIT

SLURRY COMPOSITION AND METHOD FOR POLISHING AND INTEGRATGED CIRCUIT

Chemical Mechanical Polish Slurry and Method of Manufacture

CHEMICAL MECHANICAL PLANARIZATION TOOL

FINFET CONTACTS AND METHOD FORMING SAME

CHEMICAL MECHANICAL POLISHING METHOD

Semiconductor Device Structure with Interconnect Structure and Meth...

Chemical Mechanical Polish Slurry and Method of Manufacture

SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...

CHEMICAL MECHANICAL POLISHING METHOD

CMP-FRIENDLY COATINGS FOR PLANAR RECESSING OR REMOVING OF VARIABLE...

WAFER CLEANING MODULE

Construction of thin strain-relaxed SiGe layers and method for fabr...