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Kaori ARAI
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for appointing orientation flat, apparatus for detecting ori...
Patent number
8,700,206
Issue date
Apr 15, 2014
Tokyo Electron Limited
Kaori Arai
G01 - MEASURING TESTING
Information
Patent Grant
Pre-alignment method of semiconductor wafer and computer-readable r...
Patent number
8,319,510
Issue date
Nov 27, 2012
Tokyo Electron Limited
Kazuhito Ogino
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20240178034
Publication date
May 30, 2024
TOKYO ELECTRON LIMITED
Tadashi OBIKANE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PRE-ALIGNMENT METHOD OF SEMICONDUCTOR WAFER AND COMPUTER-READABLE R...
Publication number
20100321052
Publication date
Dec 23, 2010
TOKYO ELECTRON LIMITED
Kazuhito OGINO
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR APPOINTING ORIENTATION FLAT, APPARATUS FOR DETECTING ORI...
Publication number
20100249986
Publication date
Sep 30, 2010
TOKYO ELECTRON LIMITED
Kaori ARAI
G01 - MEASURING TESTING