Kaori Mashimo

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate heat treatment apparatus
- Patent number 9,603,195
- Issue date Mar 21, 2017
- Canon Anelva Corporation
- Kaori Mashimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method for substrate heat treatment apparatus,...
- Patent number 9,431,281
- Issue date Aug 30, 2016
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treating apparatus, temperature control method of su...
- Patent number 8,691,676
- Issue date Apr 8, 2014
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20140308028
- Publication date Oct 16, 2014
- Canon ANELVA Corporation
- Kaori Mashimo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATING APPARATUS, TEMPERATURE CONTROL METHOD OF SU...
- Publication number 20130109109
- Publication date May 2, 2013
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD FOR SUBSTRATE HEAT TREATMENT APPARATUS,...
- Publication number 20120219921
- Publication date Aug 30, 2012
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD FOR HEATING APPARATUS
- Publication number 20100243618
- Publication date Sep 30, 2010
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS