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Kaori Matsumoto
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Kanagawa, JP
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last 30 patents
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Patent Grant
Method of manufacturing epitaxial silicon wafer
Patent number
7,147,710
Issue date
Dec 12, 2006
Komatsu Denshi Kinzoku Kabushiki Kaisha
Kazuya Togashi
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
Method of manufacturing epitaxial silicon wafer
Publication number
20030068502
Publication date
Apr 10, 2003
Komatsu Denshi Kinzoku Kabushiki Kaisha
Kazuya Togashi
C30 - CRYSTAL GROWTH