Kaori Shirahata

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle detector and charged particle beam device using th...
- Patent number 10,361,063
- Issue date Jul 23, 2019
- Hitachi, Ltd.
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for controlling same
- Patent number 10,014,160
- Issue date Jul 3, 2018
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern critical dimension measurement equipment and method for mea...
- Patent number 9,520,266
- Issue date Dec 13, 2016
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and inspection method using same
- Patent number 8,637,820
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam device
- Patent number 8,478,021
- Issue date Jul 2, 2013
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Detector and Charged Particle Beam Device Using th...
- Publication number 20180261425
- Publication date Sep 13, 2018
- Hitachi, Ltd
- Yasuhiro SHIRASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD FOR CONTROLLING SAME
- Publication number 20170186583
- Publication date Jun 29, 2017
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
PATTERN CRITICAL DIMENSION MEASUREMENT EQUIPMENT AND METHOD FOR MEA...
- Publication number 20150041648
- Publication date Feb 12, 2015
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME
- Publication number 20120286158
- Publication date Nov 15, 2012
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED BEAM DEVICE
- Publication number 20110274341
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING