Kaoru Fujihara

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Particulate measurement device
- Patent number 10,139,334
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Virus detection device and virus detection method
- Patent number 8,911,955
- Issue date Dec 16, 2014
- Tokyo Electron Limited
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Particle sticking prevention apparatus and plasma processing apparatus
- Patent number 8,608,422
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method, semiconductor device manufacturing apparatu...
- Patent number 8,008,211
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Akitake Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle measuring method and particle measuring apparatus
- Patent number 7,508,518
- Issue date Mar 24, 2009
- Tokyo Electron Limited
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor manufacturing facility and a semiconductor manufactur...
- Patent number 6,883,283
- Issue date Apr 26, 2005
- Tokyo Electron Limited
- Osamu Suenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical inspecting apparatus with ventilation system
- Patent number 5,910,727
- Issue date Jun 8, 1999
- Tokyo Electron Limited
- Kaoru Fujihara
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PARTICULATE MEASUREMENT DEVICE
- Publication number 20180120216
- Publication date May 3, 2018
- TOKYO ELECTRON LIMITED
- Akitake TAMURA
- G01 - MEASURING TESTING
Information Patent Application
VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD
- Publication number 20130244226
- Publication date Sep 19, 2013
- TOKYO ELECTRON LIMITED
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Application
SUPPORT STRUCTURE, LOAD LOCK APPARATUS, PROCESSING APPARATUS AND TR...
- Publication number 20110168330
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Hiromitsu SAKAUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...
- Publication number 20090206253
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Misako SAITO
- G01 - MEASURING TESTING
Information Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING APPARATU...
- Publication number 20090176374
- Publication date Jul 9, 2009
- TOKYO ELECTRON LIMITED
- Akitake TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle measuring method and particle measuring apparatus
- Publication number 20080239283
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Application
Particle sticking prevention apparatus and plasma processing apparatus
- Publication number 20050087136
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing facility and a semiconductor manufactur...
- Publication number 20020155731
- Publication date Oct 24, 2002
- Osamu Suenaga
- H01 - BASIC ELECTRIC ELEMENTS

Kaoru Fujihara

Person

Patents Grantslast 30 patents

Particulate measurement device

Virus detection device and virus detection method

Particle sticking prevention apparatus and plasma processing apparatus

Pattern forming method, semiconductor device manufacturing apparatu...

Particle measuring method and particle measuring apparatus

Semiconductor manufacturing facility and a semiconductor manufactur...

Electrical inspecting apparatus with ventilation system

Patents Applicationslast 30 patents

PARTICULATE MEASUREMENT DEVICE

VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD

SUPPORT STRUCTURE, LOAD LOCK APPARATUS, PROCESSING APPARATUS AND TR...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...

PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING APPARATU...

Particle measuring method and particle measuring apparatus

Particle sticking prevention apparatus and plasma processing apparatus

Semiconductor manufacturing facility and a semiconductor manufactur...