Kaoru Sakamoto

Person

  • Kanagawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 5,846,329
    • Issue date Dec 8, 1998
    • Tokyo Ohka Kogyo Co., Ltd.
    • Hisashi Hori
    • H01 - BASIC ELECTRIC ELEMENTS