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Kaoru Shimbara
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Kyoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate treatment method and substrate treatment apparatus
Patent number
7,413,628
Issue date
Aug 19, 2008
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate treatment method and substrate treatment apparatus
Patent number
7,241,362
Issue date
Jul 10, 2007
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate treatment method and substrate treatment apparatus
Patent number
7,018,555
Issue date
Mar 28, 2006
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
Information
Patent Application
Substrate treatment method and substrate treatment apparatus
Publication number
20060113039
Publication date
Jun 1, 2006
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE
Information
Patent Application
Substrate treatment method and substrate treatment apparatus
Publication number
20050193943
Publication date
Sep 8, 2005
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE
Information
Patent Application
Foreign matter removing apparatus, substrate treating apparatus, an...
Publication number
20040261817
Publication date
Dec 30, 2004
Dainippon Screen Mfg. Co., Ltd.
Hiroyuki Araki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treatment method and substrate treatment apparatus
Publication number
20040159343
Publication date
Aug 19, 2004
Dainippon Screen Mfg. Co., Ltd.
Kaoru Shimbara
G11 - INFORMATION STORAGE