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Kaoru TSURUTA
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Drawing apparatus and control method thereof
Patent number
11,352,694
Issue date
Jun 7, 2022
NuFlare Technology, Inc.
Satoshi Nakahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,472,372
Issue date
Oct 18, 2016
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, and charged particle beam...
Patent number
9,190,245
Issue date
Nov 17, 2015
NuFlare Technology, Inc.
Tomoo Motosugi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
Patent number
8,748,843
Issue date
Jun 10, 2014
Nuflare Technology, Inc.
Kaoru Tsuruta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correcting substrate for charged particle beam lithography apparatus
Patent number
8,183,544
Issue date
May 22, 2012
Nuflare Technology, Inc.
Kaoru Tsuruta
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DRAWING APPARATUS AND CONTROL METHOD THEREOF
Publication number
20190127847
Publication date
May 2, 2019
NuFlare Technology, Inc.
Satoshi NAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20160020063
Publication date
Jan 21, 2016
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
Publication number
20150228455
Publication date
Aug 13, 2015
NuFlare Technology, Inc.
Tomoo MOTOSUGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
Publication number
20130037724
Publication date
Feb 14, 2013
NuFlare Technology, Inc.
Kaoru TSURUTA
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR PATTERN WRITING WITH CHARGED-PARTICLE BEAM
Publication number
20110089346
Publication date
Apr 21, 2011
NuFlare Technology, Inc.
Kaoru Tsuruta
B82 - NANO-TECHNOLOGY
Information
Patent Application
CORRECTING SUBSTRATE FOR CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS
Publication number
20090242807
Publication date
Oct 1, 2009
NuFlare Technology, Inc.
Kaoru TSURUTA
B82 - NANO-TECHNOLOGY