Kaoru Yamada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for regenerating ion exchanger
- Patent number 8,133,380
- Issue date Mar 13, 2012
- Ebara Corporation
- Takayuki Saito
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,638,030
- Issue date Dec 29, 2009
- Ebara Corporation
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus, substrate processing method, and su...
- Patent number 7,578,886
- Issue date Aug 25, 2009
- Ebara Corporation
- Kaoru Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,476,290
- Issue date Jan 13, 2009
- Ebara Corporation
- Takayuki Saito
- B08 - CLEANING
Information Patent Grant
Method and device for regenerating ion exchanger, and electrolytic...
- Patent number 7,427,345
- Issue date Sep 23, 2008
- Ebara Corporation
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,208,076
- Issue date Apr 24, 2007
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrolytic processing device and substrate processing apparatus
- Patent number 7,101,465
- Issue date Sep 5, 2006
- Ebara Corporation
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 6,932,884
- Issue date Aug 23, 2005
- Ebara Corporation
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20090090397
- Publication date Apr 9, 2009
- Takayuki Saito
- B08 - CLEANING
Information Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
- Publication number 20080314763
- Publication date Dec 25, 2008
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate Cleaning Apparatus and Substrate Processing Unit
- Publication number 20070277930
- Publication date Dec 6, 2007
- Toshi Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20070187259
- Publication date Aug 16, 2007
- Itsuki Kobata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus, substrate processing method, and su...
- Publication number 20060234503
- Publication date Oct 19, 2006
- Kaoru Yamada
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20050242064
- Publication date Nov 3, 2005
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050092351
- Publication date May 5, 2005
- Takayuki Saito
- B08 - CLEANING
Information Patent Application
Electrolytic processing apparatus and method
- Publication number 20040256237
- Publication date Dec 23, 2004
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing appartus and method
- Publication number 20040231989
- Publication date Nov 25, 2004
- Itsuki Kobata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20040129569
- Publication date Jul 8, 2004
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
- Publication number 20040112761
- Publication date Jun 17, 2004
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing device and substrate processing apparatus
- Publication number 20030136668
- Publication date Jul 24, 2003
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing device and substrate processing apparatus
- Publication number 20030132103
- Publication date Jul 17, 2003
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing apparatus
- Publication number 20030041968
- Publication date Mar 6, 2003
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS

Kaoru Yamada

Person

Patents Grantslast 30 patents

Method for regenerating ion exchanger

Electrolytic processing apparatus and electrolytic processing method

Substrate processing apparatus, substrate processing method, and su...

Substrate processing apparatus and substrate processing method

Method and device for regenerating ion exchanger, and electrolytic...

Substrate processing apparatus and method

Electrolytic processing device and substrate processing apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

Substrate processing apparatus and substrate processing method

Method and device for regenerating ion exchanger, and electrolytic...

Substrate Cleaning Apparatus and Substrate Processing Unit

Substrate processing apparatus and method

Substrate processing apparatus, substrate processing method, and su...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Electrolytic processing apparatus and method

Substrate processing appartus and method

Electrolytic processing apparatus and electrolytic processing method

Method and device for regenerating ion exchanger, and electrolytic...

Electrolytic processing device and substrate processing apparatus

Electrolytic processing device and substrate processing apparatus

Substrate processing apparatus