Kaoru Yamamoto

Person

Delmar, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma enhanced atomic layer deposition system and method
- Patent number 8,163,087
- Issue date Apr 24, 2012
- Tokyo Electron Limited
- Jacques Faguet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced atomic layer deposition system
- Patent number 7,651,568
- Issue date Jan 26, 2010
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced atomic layer deposition system and method
- Patent number 7,314,835
- Issue date Jan 1, 2008
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...
- Publication number 20120315404
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116873
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116872
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma enhanced atomic layer deposition system and method
- Publication number 20060225655
- Publication date Oct 12, 2006
- TOKYO ELECTRON LIMITED
- Jacques Faguet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma enhanced atomic layer deposition system
- Publication number 20060213437
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma enhanced atomic layer deposition system
- Publication number 20060213438
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma enhanced atomic layer deposition system and method
- Publication number 20060211246
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kaoru Yamamoto

Person

Patents Grantslast 30 patents

Plasma enhanced atomic layer deposition system and method

Plasma enhanced atomic layer deposition system

Plasma enhanced atomic layer deposition system and method

Patents Applicationslast 30 patents

APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...

Apparatus for thermal and plasma enhanced vapor deposition and meth...

Apparatus for thermal and plasma enhanced vapor deposition and meth...

Plasma enhanced atomic layer deposition system and method

Plasma enhanced atomic layer deposition system

Plasma enhanced atomic layer deposition system

Plasma enhanced atomic layer deposition system and method