Kapil Umesh Sawlani

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Determination of recipes for manufacturing semiconductor devices
- Patent number 11,836,429
- Issue date Dec 5, 2023
- Lam Research Corporation
- Kapil Umesh Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification and source analysis for semiconductor equipment
- Patent number 11,263,737
- Issue date Mar 1, 2022
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Atomic layer deposition of tungsten for enhanced fill and reduced s...
- Patent number 11,225,712
- Issue date Jan 18, 2022
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fill process optimization using feature scale modeling
- Patent number 10,977,405
- Issue date Apr 13, 2021
- Lam Research Corporation
- Michael Bowes
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
In-situ chamber clean end point detection systems and methods using...
- Patent number 10,895,539
- Issue date Jan 19, 2021
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Atomic layer deposition of tungsten for enhanced fill and reduced s...
- Patent number 10,214,807
- Issue date Feb 26, 2019
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATING DIGITAL TWINS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20240378347
- Publication date Nov 14, 2024
- LAM RESEARCH CORPORATION
- Sassan Roham
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINATION OF RECIPES FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240095432
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Kapil Umesh Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PREDICTIVE MAINTENANCE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20230400847
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Jian Guo
- G05 - CONTROLLING REGULATING
Information Patent Application
PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES
- Publication number 20230049157
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Kapil Umesh Sawlani
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINATION OF RECIPE FOR MANUFACTURING SEMICONDUCTOR
- Publication number 20220374572
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Kapil Umesh Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20220270237
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILL PROCESS OPTIMIZATION USING FEATURE SCALE MODELING
- Publication number 20200242209
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Michael Bowes
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20200226742
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN FOR ENHANCED FILL AND REDUCED S...
- Publication number 20190185992
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...
- Publication number 20190120775
- Publication date Apr 25, 2019
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G01 - MEASURING TESTING
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN FOR ENHANCED FILL AND REDUCED S...
- Publication number 20170350008
- Publication date Dec 7, 2017
- LAM RESEARCH CORPORATION
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kapil Umesh Sawlani

Person

Patents Grantslast 30 patents

Determination of recipes for manufacturing semiconductor devices

Defect classification and source analysis for semiconductor equipment

Atomic layer deposition of tungsten for enhanced fill and reduced s...

Fill process optimization using feature scale modeling

In-situ chamber clean end point detection systems and methods using...

Atomic layer deposition of tungsten for enhanced fill and reduced s...

Patents Applicationslast 30 patents

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

GENERATING DIGITAL TWINS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

IMAGE ANALYSIS OF PLASMA CONDITIONS

DETERMINATION OF RECIPES FOR MANUFACTURING SEMICONDUCTOR DEVICES

PREDICTIVE MAINTENANCE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

PERFORMANCE PREDICTORS FOR SEMICONDUCTOR-MANUFACTURING PROCESSES

DETERMINATION OF RECIPE FOR MANUFACTURING SEMICONDUCTOR

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

FILL PROCESS OPTIMIZATION USING FEATURE SCALE MODELING

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

ATOMIC LAYER DEPOSITION OF TUNGSTEN FOR ENHANCED FILL AND REDUCED S...

IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...

ATOMIC LAYER DEPOSITION OF TUNGSTEN FOR ENHANCED FILL AND REDUCED S...