Kareem Boumatar

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Vancouver, WA, US

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Patents Grantslast 30 patents

Information Patent Grant
Defect control and stability of DC bias in RF plasma-based substrat...
- Patent number 10,704,149
- Issue date Jul 7, 2020
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Defect control in RF plasma substrate processing systems using DC b...
- Patent number 10,081,869
- Issue date Sep 25, 2018
- Lam Research Corporation
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Defect control and stability of DC bias in RF plasma-based substrat...
- Patent number 10,047,438
- Issue date Aug 14, 2018
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the reduction of defectivity in vapor deposited films
- Patent number 9,328,416
- Issue date May 3, 2016
- Lam Research Corporation
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DC BIAS CIRCUIT AND GAS DELIVERY SYSTEM FOR SUBSTRATE PROCESSING SY...
- Publication number 20200332418
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Arul Dhas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...
- Publication number 20180347046
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Arul Dhas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CONTROL IN RF PLASMA SUBSTRATE PROCESSING SYSTEMS USING DC B...
- Publication number 20150357161
- Publication date Dec 10, 2015
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...
- Publication number 20150354061
- Publication date Dec 10, 2015
- LAM RESEARCH CORPORATION
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR THE REDUCTION OF DEFECTIVITY IN VAPOR DEPO...
- Publication number 20150203967
- Publication date Jul 23, 2015
- LAM RESEARCH CORPORATION
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...