Karem Kapkin

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Watsonville, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of hafnium-based high-k dielectric
- Patent number 7,205,247
- Issue date Apr 17, 2007
- Aviza Technology, Inc.
- Sang-In Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...