Karen Greig

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Oxygen plasma treatment for enhanced HDP-CVD gapfill
- Patent number 7,229,931
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Oxygen plasma treatment for enhanced HDP-CVD gapfill
- Publication number 20050282398
- Publication date Dec 22, 2005
- APPLIED MATERIALS, INC., A Delaware corporation
- Hemant P. Mungekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...