Karena Shannon

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Flowable oxide film with tunable wet etch rate
- Patent number 9,299,559
- Issue date Mar 29, 2016
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flowable oxide film with tunable wet etch rate
- Patent number 8,846,536
- Issue date Sep 30, 2014
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE VACUUM CHAMBER EXHAUST SYSTEM AND METHOD OF EVACUATING MUL...
- Publication number 20220238354
- Publication date Jul 28, 2022
- Edwards Vacuum LLC
- Declan Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE
- Publication number 20150044882
- Publication date Feb 12, 2015
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE OXIDE FILM WITH TUNABLE WET ETCH RATE
- Publication number 20130230987
- Publication date Sep 5, 2013
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM UP FILL IN HIGH ASPECT RATIO TRENCHES
- Publication number 20120149213
- Publication date Jun 14, 2012
- Lakshminarayana Nittala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...