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Karin Eggers
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for dynamically monitoring a reticle
Patent number
7,304,721
Issue date
Dec 4, 2007
Infineon Technologies AG
Henning Haffner
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Device for the storage and use of at least one photomask for lithog...
Publication number
20070187272
Publication date
Aug 16, 2007
Anja Bonness
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Photo mask and method to form a self-assembled monolayer and an ino...
Publication number
20060257751
Publication date
Nov 16, 2006
Karin Eggers
B82 - NANO-TECHNOLOGY
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Patent Application
Method for dynamically monitoring a reticle
Publication number
20050125164
Publication date
Jun 9, 2005
Henning Haffner
G01 - MEASURING TESTING