Karl-Eugen Aubele

Person

Geislingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for moving an optical element of a projection exposure appar...
- Patent number 8,879,046
- Issue date Nov 4, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning method for an optical arrangement of a projection illum...
- Patent number 8,810,934
- Issue date Aug 19, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 8,570,676
- Issue date Oct 29, 2013
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly
- Patent number 7,929,227
- Issue date Apr 19, 2011
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 7,791,826
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and a device for positioning an element in an optical system
- Patent number 7,684,131
- Issue date Mar 23, 2010
- Carl Zeiss SMT AG
- Karl-Eugen Aubele
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for dynamic manipulation of a position of a module in an opt...
- Patent number 6,759,670
- Issue date Jul 6, 2004
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Grant
Coordinate measurement machine having a probe head and an electroni...
- Patent number 5,526,576
- Issue date Jun 18, 1996
- Carl-Zeiss-Stiftung, Heidenheim (Brenz)
- Anton Fuchs
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...
- Publication number 20140078487
- Publication date Mar 20, 2014
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Application
POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...
- Publication number 20110235005
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20110181857
- Publication date Jul 28, 2011
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20100271607
- Publication date Oct 28, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Assembly
- Publication number 20080170303
- Publication date Jul 17, 2008
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
METHOD AND A DEVICE FOR POSITIONING AN ELEMENT IN AN OPTICAL SYSTEM
- Publication number 20080080070
- Publication date Apr 3, 2008
- Karl-Eugen Aubele
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for dynamic manipulation of a position of a module in an opt...
- Publication number 20020074529
- Publication date Jun 20, 2002
- Karl-Eugen Aubele
- G02 - OPTICS

Karl-Eugen Aubele

Person

Patents Grantslast 30 patents

Method for moving an optical element of a projection exposure appar...

Positioning method for an optical arrangement of a projection illum...

Optical assembly

Imaging device in a projection exposure facility

Imaging device in a projection exposure facility

Optical assembly

Optical assembly

Imaging device in a projection exposure machine

Method and a device for positioning an element in an optical system

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Method for dynamic manipulation of a position of a module in an opt...

Coordinate measurement machine having a probe head and an electroni...

Patents Applicationslast 30 patents

METHOD FOR MOVING AN OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPAR...

POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

OPTICAL ASSEMBLY

OPTICAL ASSEMBLY

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

Optical Assembly

METHOD AND A DEVICE FOR POSITIONING AN ELEMENT IN AN OPTICAL SYSTEM

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Method for dynamic manipulation of a position of a module in an opt...