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VIBRATION SENSOR
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Publication date Jun 5, 2025
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The Regents of the University of Michigan
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Alison HAKE
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication date Oct 19, 2023
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIBRATION SENSOR
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Publication date Jul 7, 2022
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The Regents of the University of Michigan
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Alison HAKE
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20210273152
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Publication date Sep 2, 2021
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20200148532
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Publication date May 14, 2020
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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COCHLEAR IMPLANT
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Publication number 20180200517
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Publication date Jul 19, 2018
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The Regents of the University of Michigan
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Katherine Elizabeth Knisely
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A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20180138391
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Publication date May 17, 2018
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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COCHLEAR IMPLANT
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Publication number 20150231394
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Publication date Aug 20, 2015
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The Regents of the University of Michigan
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Katherine Elizabeth Knisely
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A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20130329920
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Publication date Dec 12, 2013
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PIEZOELECTRIC MEMS MICROPHONE
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Publication number 20100254547
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Publication date Oct 7, 2010
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The Regents of the University of Michigan
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Karl Grosh
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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