Karl-Heinz Hohenwarter

Person

Dallach/Gail, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 10,068,792
- Issue date Sep 4, 2018
- Lam Research AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,536,770
- Issue date Jan 3, 2017
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,355,883
- Issue date May 31, 2016
- Lam Research AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,316,443
- Issue date Apr 19, 2016
- Lam Research AG
- Karl-Heinz Hohenwarter
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Device and method for wet treating disc-shaped articles
- Patent number 8,955,529
- Issue date Feb 17, 2015
- Lam Research AG
- Karl-Heinz Hohenwarter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Closed chamber for wafer wet processing
- Patent number 8,926,788
- Issue date Jan 6, 2015
- Lam Research AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating disc-shaped articles
- Patent number 7,837,803
- Issue date Nov 23, 2010
- Lam Research AG
- Karl-Heinz Hohenwarter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Device for liquid treatment of disk-shaped objects
- Patent number 7,122,084
- Issue date Oct 17, 2006
- Sez AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20230411177
- Publication date Dec 21, 2023
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
- Publication number 20210366738
- Publication date Nov 25, 2021
- LAM RESEARCH AG
- Bhaskar BANDARAPU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20170345684
- Publication date Nov 30, 2017
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160376702
- Publication date Dec 29, 2016
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20150200123
- Publication date Jul 16, 2015
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20140053982
- Publication date Feb 27, 2014
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- B44 - DECORATIVE ARTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140054280
- Publication date Feb 27, 2014
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20140026926
- Publication date Jan 30, 2014
- LAM RESEARCH AG
- Christoph SEMMELROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20130061873
- Publication date Mar 14, 2013
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE
- Publication number 20130008602
- Publication date Jan 10, 2013
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20120286481
- Publication date Nov 15, 2012
- LAM RESEARCH AG
- Michael PUGGL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED CHAMBER FOR WAFER WET PROCESSING
- Publication number 20120103522
- Publication date May 3, 2012
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR WET TREATING DISC-SHAPED ARTICLES
- Publication number 20100101424
- Publication date Apr 29, 2010
- LAM RESEARCH AG
- KARL-HEINZ HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for wet treating disc-shaped articles
- Publication number 20070175500
- Publication date Aug 2, 2007
- SEZ AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS

Karl-Heinz Hohenwarter

Person

Patents Grantslast 30 patents

Method and apparatus for liquid treatment of wafer shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Device and method for wet treating disc-shaped articles

Closed chamber for wafer wet processing

Device and method for wet treating disc-shaped articles

Device for liquid treatment of disk-shaped objects

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE

VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE

DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

CLOSED CHAMBER FOR WAFER WET PROCESSING

DEVICE AND METHOD FOR WET TREATING DISC-SHAPED ARTICLES

Device and method for wet treating disc-shaped articles