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Karl-Heinz Kaiser
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Boblingen, DE
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last 30 patents
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Patent Grant
Method of setting a position of an object of measurement in layer t...
Patent number
6,370,221
Issue date
Apr 9, 2002
Helmut Fischer GmbH Institut fur Elektronik und Messtechnik
Karl-Heinz Kaiser
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for measuring the thicknesses of thin layers b...
Patent number
6,038,280
Issue date
Mar 14, 2000
Helmut Fischer GmbH & Co. Institut Fur Electronik Und Messtechnik
Volker Rossiger
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method of setting a position of an object of measurement in layer t...
Publication number
20010022829
Publication date
Sep 20, 2001
Karl-Heinz Kaiser
G01 - MEASURING TESTING