Karl-Stefan WEISSENRIEDER

Person

Elchingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 9,733,395
- Issue date Aug 15, 2017
- Carl Zeiss SMT GmbH
- Vladimir Kamenov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micromirror arrangement having a coating and method for the product...
- Patent number 8,928,980
- Issue date Jan 6, 2015
- Carl Zeiss SMT GmbH
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for immersion lithography
- Patent number 7,460,206
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20170322343
- Publication date Nov 9, 2017
- Carl Zeiss SMT GMBH
- Vladimir Kamenov
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20140320955
- Publication date Oct 30, 2014
- Vladimir Kamenov
- G02 - OPTICS
Information Patent Application
MICROMIRROR ARRANGEMENT HAVING A COATING AND METHOD FOR THE PRODUCT...
- Publication number 20120182606
- Publication date Jul 19, 2012
- Carl Zeiss SMT GMBH
- Karl-Stefan WEISSENRIEDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20110222043
- Publication date Sep 15, 2011
- Carl Zeiss SMT GMBH
- Vladimir Kamenov
- G02 - OPTICS
Information Patent Application
Microlithographic projection exposure apparatus
- Publication number 20080297754
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Vladimir Kamenov
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080297745
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Karl-Stefan WEISSENRIEDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080291419
- Publication date Nov 27, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection objective for immersion lithography
- Publication number 20050225737
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Karl-Stefan WEISSENRIEDER

Person

Patents Grantslast 30 patents

Microlithographic projection exposure apparatus

Micromirror arrangement having a coating and method for the product...

Projection objective for immersion lithography

Patents Applicationslast 30 patents

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROMIRROR ARRANGEMENT HAVING A COATING AND METHOD FOR THE PRODUCT...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Microlithographic projection exposure apparatus

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

Projection objective for immersion lithography