Karla Hiller

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Loessnitz, DE

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Patents Grantslast 30 patents

Information Patent Grant
MEMS vacuum sensor based on the friction principle
- Patent number 8,186,225
- Issue date May 29, 2012
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Steffen Kurth
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a torsion spring
- Patent number 6,863,832
- Issue date Mar 8, 2005
- Litef GmbH
- Maik Wiemer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20210147223
- Publication date May 20, 2021
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Roman Forke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
- Publication number 20100024562
- Publication date Feb 4, 2010
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
- Steffen Kurth
- G01 - MEASURING TESTING