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Waalre, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method of operating a patterning device and lithographic apparatus
Patent number
9,958,788
Issue date
May 1, 2018
ASML Netherlands B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a patterning device and lithographic apparatus
Patent number
9,568,833
Issue date
Feb 14, 2017
ASML Netherlands B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a patterning device and lithographic apparatus
Patent number
9,417,533
Issue date
Aug 16, 2016
ASML Netherlands B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method using dose c...
Patent number
9,176,392
Issue date
Nov 3, 2015
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method using interf...
Patent number
8,264,667
Issue date
Sep 11, 2012
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic system, device manufacturing method, setpoint data opt...
Patent number
8,259,285
Issue date
Sep 4, 2012
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,159,647
Issue date
Apr 17, 2012
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimal rasterization for maskless lithography
Patent number
8,009,269
Issue date
Aug 30, 2011
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,965,380
Issue date
Jun 21, 2011
ASML Netherland B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,859,647
Issue date
Dec 28, 2010
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for maskless lithography real-time pattern raster...
Patent number
7,773,287
Issue date
Aug 10, 2010
ASML Holding N.V.
Azat M. Latypov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing mu...
Patent number
7,728,956
Issue date
Jun 1, 2010
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for generating pattern data used to control a pat...
Patent number
7,713,667
Issue date
May 11, 2010
ASML Holding N.V.
Azat M. Latypov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic processing cell, lithographic apparatus, track and dev...
Patent number
7,679,715
Issue date
Mar 16, 2010
ASML Netherlands B.V.
Stefan Geerte Kruijswijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,548,302
Issue date
Jun 16, 2009
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,538,855
Issue date
May 26, 2009
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method, and computer program product for ge...
Patent number
7,500,218
Issue date
Mar 3, 2009
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method, an integrat...
Patent number
7,499,146
Issue date
Mar 3, 2009
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method using a comp...
Patent number
7,466,394
Issue date
Dec 16, 2008
ASML Netherlands B.V.
Kars Zeger Troost
G02 - OPTICS
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Patent Grant
Lithographic apparatus and device manufacturing method using interf...
Patent number
7,440,078
Issue date
Oct 21, 2008
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,411,652
Issue date
Aug 12, 2008
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic processing cell, lithographic apparatus, track and dev...
Patent number
7,403,259
Issue date
Jul 22, 2008
ASML Netherlands B.V.
Stefan Geerte Kruijswijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light patterning device using tilting mirrors in a superpixel form
Patent number
7,400,382
Issue date
Jul 15, 2008
ASML Holding N.V.
Nabila Baba-Ali
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,362,415
Issue date
Apr 22, 2008
ASML Netherlands B.V.
Dominicus Jacobus Petrus Adrianus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,349,068
Issue date
Mar 25, 2008
ASML Netherlands B.V.
Karel Diederick Van Der Mast
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,304,718
Issue date
Dec 4, 2007
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing pl...
Patent number
7,209,217
Issue date
Apr 24, 2007
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for maskless lithography real-time pattern raster...
Patent number
7,209,275
Issue date
Apr 24, 2007
ASML Holding N.V.
Azat M. Latypov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,177,012
Issue date
Feb 13, 2007
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method utilizing dose control
Patent number
7,123,348
Issue date
Oct 17, 2006
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR HIGH NUMERICAL APERTURE THRU-SLIT SOURCE MASK OPTIMIZATION
Publication number
20220050373
Publication date
Feb 17, 2022
ASML NETHERLANDS B.V.
Kars Zeger TROOST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OPERATING A PATTERNING DEVICE AND LITHOGRAPHIC APPARATUS
Publication number
20170123323
Publication date
May 4, 2017
ASML NETHERLANDS B.V.
Vitaliy PROSYENTSOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OPERATING A PATTERNING DEVICE AND LITHOGRAPHIC APPARATUS
Publication number
20150029481
Publication date
Jan 29, 2015
ASML NETHERLANDS B.V.
Vitaliy PROSYENTSOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method Using Dose C...
Publication number
20140176929
Publication date
Jun 26, 2014
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OPERATING A PATTERNING DEVICE, LITHOGRAPHIC APPARATUS AND...
Publication number
20120133914
Publication date
May 31, 2012
ASML NETHERLANDS B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20080297747
Publication date
Dec 4, 2008
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic processing cell, lithographic apparatus, track and dev...
Publication number
20080266538
Publication date
Oct 30, 2008
ASML NETHERLANDS B.V.
Stefan Geerte Kruijswijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optimal Rasterization for Maskless Lithography
Publication number
20080224251
Publication date
Sep 18, 2008
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic system, device manufacturing method, setpoint data opt...
Publication number
20080143982
Publication date
Jun 19, 2008
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20080137053
Publication date
Jun 12, 2008
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070273853
Publication date
Nov 29, 2007
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for maskless lithography real-time pattern raster...
Publication number
20070268547
Publication date
Nov 22, 2007
ASML Holding N.V.
Azat M. Latypov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method using interf...
Publication number
20070258078
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070252967
Publication date
Nov 1, 2007
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method using multip...
Publication number
20070153249
Publication date
Jul 5, 2007
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method using a comp...
Publication number
20070139637
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Kars Zeger Troost
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method using interf...
Publication number
20070139633
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method using dose c...
Publication number
20070030471
Publication date
Feb 8, 2007
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Light patterning device using tilting mirrors in a superpixel form
Publication number
20060245033
Publication date
Nov 2, 2006
ASML Holding, N.V.
Nabila Baba-Ali
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Lithographic apparatus and device manufacturing method utilizing pl...
Publication number
20060227311
Publication date
Oct 12, 2006
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method utilizing mu...
Publication number
20060221320
Publication date
Oct 5, 2006
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method, an integrat...
Publication number
20060203220
Publication date
Sep 14, 2006
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060138349
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060132742
Publication date
Jun 22, 2006
ASML Netherland B.V.
Karel Diederick Van Der Mast
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060119815
Publication date
Jun 8, 2006
Dominicus Jacobus Petrus Adrianus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for generating pattern data used to control a pat...
Publication number
20060115752
Publication date
Jun 1, 2006
ASML Holding N.V.
Azat M. Latypov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060082752
Publication date
Apr 20, 2006
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method, and computer program product for ge...
Publication number
20060040187
Publication date
Feb 23, 2006
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060038969
Publication date
Feb 23, 2006
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060035160
Publication date
Feb 16, 2006
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY