Karsten Frenner

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Leonberg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 8,804,123
- Issue date Aug 12, 2014
- ASML Netherlands B.V.
- Wolfgang Max Adolf Bernhard Osten
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Sensor Element For Photoluminescence Measurements, Photoluminescenc...
- Publication number 20170089835
- Publication date Mar 30, 2017
- UNIVERSITAT STUTTGART
- Martin Bogner
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20130050700
- Publication date Feb 28, 2013
- ASML NETHERLANDS B.V.
- Wolfgang Max Adolf Bernhard OSTEN
- G01 - MEASURING TESTING