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Karthik Colinjivadi
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San Jose, CA, US
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last 30 patents
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Patent Grant
Metal-containing passivation for high aspect ratio etch
Patent number
11,670,516
Issue date
Jun 6, 2023
Lam Research Corporation
Karthik S. Colinjivadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal doped carbon based hard mask removal in semiconductor fabrica...
Patent number
11,062,897
Issue date
Jul 13, 2021
Lam Research Corporation
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High density plasma etchback process for advanced metallization app...
Patent number
8,431,033
Issue date
Apr 30, 2013
Novellus Systems, Inc.
Chunming Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING...
Publication number
20220199417
Publication date
Jun 23, 2022
LAM RESEARCH CORPORATION
Jon HENRI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH
Publication number
20210242032
Publication date
Aug 5, 2021
LAM RESEARCH CORPORATION
Karthik S. COLINJIVADI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL DOPED CARBON BASED HARD MASK REMOVAL IN SEMICONDUCTOR FABRICA...
Publication number
20180358220
Publication date
Dec 13, 2018
LAM RESEARCH CORPORATION
Yongsik Yu
C01 - INORGANIC CHEMISTRY
Information
Patent Application
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...
Publication number
20120228125
Publication date
Sep 13, 2012
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH DENSITY PLASMA ETCHBACK PROCESS FOR ADVANCED METALLIZATION APP...
Publication number
20120152896
Publication date
Jun 21, 2012
Chunming Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...
Publication number
20120070589
Publication date
Mar 22, 2012
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...