Karthik Elumalai

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with reduced current leakage for hybrid laser s...
- Patent number 11,600,492
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Sai Abhinand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling warpage in wafer level packag...
- Patent number 11,421,316
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Prayudi Lianto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
- Patent number 11,111,583
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Next generation warpage measurement system
- Patent number 10,446,423
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Jun-Liang Su
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for correcting substrate deformity
- Patent number 10,325,790
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Eng Sheng Peh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
- Patent number 9,845,533
- Issue date Dec 19, 2017
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for correcting substrate deformity
- Patent number 9,818,624
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Jen Sern Lew
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Electrostatic carrier for handling substrates for processing
- Patent number 9,740,111
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Arvind Sundarrajan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reusable substrate carrier
- Patent number 9,478,697
- Issue date Oct 25, 2016
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH REDUCED CURRENT LEAKAGE FOR HYBRID LASER S...
- Publication number 20210175086
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Sai Abhinand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING WARPAGE IN WAFER LEVEL PACKAG...
- Publication number 20200131624
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- PRAYUDI LIANTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY
- Publication number 20180218928
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Eng Sheng PEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEXT GENERATION WARPAGE MEASUREMENT SYSTEM
- Publication number 20180144960
- Publication date May 24, 2018
- Applied Materials, Inc.
- JUN-LIANG SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...
- Publication number 20180112310
- Publication date Apr 26, 2018
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY
- Publication number 20160322234
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Jen Sern LEW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REUSABLE SUBSTRATE CARRIER
- Publication number 20160133781
- Publication date May 12, 2016
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...
- Publication number 20160133782
- Publication date May 12, 2016
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL FLUID-BASED THERMAL CONTROL
- Publication number 20150332942
- Publication date Nov 19, 2015
- Eng Sheng Peh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CARRIER FOR HANDLING SUBSTRATES FOR PROCESSING
- Publication number 20150331337
- Publication date Nov 19, 2015
- Arvind Sundarrajan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Karthik Elumalai

Person

Patents Grantslast 30 patents

Electrostatic chuck with reduced current leakage for hybrid laser s...

Methods and apparatus for controlling warpage in wafer level packag...

Substrate carrier system utilizing electrostatic chucking to accomm...

Next generation warpage measurement system

Methods and apparatus for correcting substrate deformity

Substrate carrier system utilizing electrostatic chucking to accomm...

Methods and apparatus for correcting substrate deformity

Electrostatic carrier for handling substrates for processing

Reusable substrate carrier

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK WITH REDUCED CURRENT LEAKAGE FOR HYBRID LASER S...

METHODS AND APPARATUS FOR CONTROLLING WARPAGE IN WAFER LEVEL PACKAG...

METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY

NEXT GENERATION WARPAGE MEASUREMENT SYSTEM

SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...

METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY

REUSABLE SUBSTRATE CARRIER

SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...

PEDESTAL FLUID-BASED THERMAL CONTROL

ELECTROSTATIC CARRIER FOR HANDLING SUBSTRATES FOR PROCESSING