Karthik Elumalai

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Mainframe-less wafer transfer platform with linear transfer system...
- Patent number 11,721,583
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH REDUCED CURRENT LEAKAGE FOR HYBRID LASER S...
- Publication number 20230187215
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Sai Abhinand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHADOW RING KIT FOR PLASMA ETCH WAFER SINGULATION PROCESS
- Publication number 20220108908
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Karthik Elumalai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINFRAME-LESS WAFER TRANSFER PLATFORM FOR WAFER PROCESSING MODULES
- Publication number 20220044968
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR