Karthik Janakiraman

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Seam removal in high aspect ratio gap-fill
- Patent number 12,142,480
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 12,131,913
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal-doped boron films
- Patent number 12,077,852
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Actively cooled foreline trap to reduce throttle valve drift
- Patent number 12,060,637
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Gaosheng Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processes for depositing sib films
- Patent number 12,033,848
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Aykut Aydin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron concentration tunability in boron-silicon films
- Patent number 11,961,739
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
- Patent number 11,939,675
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,939,674
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphous silicon-based films resistant to crystallization
- Patent number 11,827,514
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Aykut Aydin
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
- Patent number 11,817,320
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Susmit Singha Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming hardmasks
- Patent number 11,699,585
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 11,694,902
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping semiconductor films
- Patent number 11,676,813
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing high-density carbon films for hardmasks and o...
- Patent number 11,664,226
- Issue date May 30, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing high-density, nitrogen-doped carbon films for...
- Patent number 11,664,214
- Issue date May 30, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition of silicon-containing films at low tempe...
- Patent number 11,640,905
- Issue date May 2, 2023
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,618,949
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen management in plasma deposited films
- Patent number 11,562,902
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling concentration profiles for deposited films using machin...
- Patent number 11,532,525
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Anton V Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple spacer patterning schemes
- Patent number 11,527,408
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Tzu-shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal halogen doping in 3D structures using conformal dopant fi...
- Patent number 11,462,630
- Issue date Oct 4, 2022
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for modifying photoresist profiles and tuning critical dime...
- Patent number 11,456,173
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Meenakshi Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation via pulsed RF plasma
- Patent number 11,443,919
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Krishna Nittala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardmasks and processes for forming hardmasks by plasma-enhanced ch...
- Patent number 11,421,324
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for conformal doping of three dimensional structures
- Patent number 11,335,555
- Issue date May 17, 2022
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387174
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR DEPOSITING SIB FILMS
- Publication number 20240339316
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Aykut AYDIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL RELATIVE TO METAL-...
- Publication number 20240266185
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20240266171
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...
- Publication number 20240035195
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Qinghua ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON MOLD FOR DRAM CAPACITOR
- Publication number 20240038833
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Fredrick Fishburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING THERMALLY STABLE CARBON FILM
- Publication number 20230335402
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...
- Publication number 20230317463
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Krishna NITTALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL IMPROVEMENTS FOR 3D NAND
- Publication number 20230309300
- Publication date Sep 28, 2023
- Applied Materials, Inc.
- Dimitrios Pavlopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION FOR REDUCED HYDROGEN INCORPORATION IN AMORPHOUS SI...
- Publication number 20230298892
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS
- Publication number 20230203652
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20230146981
- Publication date May 11, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20230118964
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SPACER PATTERNING SCHEMES
- Publication number 20230093450
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Tzu-shun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL
- Publication number 20230050255
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAM-FREE GAPFILL DEPOSITION
- Publication number 20230051200
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, APPARATUS, AND SYSTEMS FOR MAINTAINING FILM MODULUS WITHIN...
- Publication number 20230022359
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR DEPOSITING SIB FILMS
- Publication number 20220406594
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Aykut AYDIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT FOR HIGH-TEMPERATURE CLEANS
- Publication number 20220384161
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL-DOPED BORON FILMS
- Publication number 20220341034
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20220285232
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...
- Publication number 20220262643
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Krishna NITTALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAPFILL PROCESS USING PULSED HIGH-FREQUENCY RADIO-FREQUENCY (HFRF)...
- Publication number 20220238331
- Publication date Jul 28, 2022
- Applied Materials, Inc.
- Aykut Aydin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED DEPOSITION OF SILICON-CONTAINING FILMS AT LOW TEMPE...
- Publication number 20220199404
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY COOLED FORELINE TRAP TO REDUCE THROTTLE VALVE DRIFT
- Publication number 20220170151
- Publication date Jun 2, 2022
- Applied Materials, Inc.
- Gaosheng Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDMASKS AND PROCESSES FOR FORMING HARDMASKS BY PLASMA ENHANCED CH...
- Publication number 20220119953
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jui-Yuan HSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING HARDMASKS
- Publication number 20220122835
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20220108892
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Karthik Janakiraman

Person

Patents Grantslast 30 patents

Seam removal in high aspect ratio gap-fill

Methods, systems, and apparatus for processing substrates using one...

Metal-doped boron films

Actively cooled foreline trap to reduce throttle valve drift

Systems and methods for substrate support temperature control

Processes for depositing sib films

Boron concentration tunability in boron-silicon films

Apparatus and methods for improving thermal chemical vapor depositi...

Methods to reduce material surface roughness

Amorphous silicon-based films resistant to crystallization

Heated pedestal design for improved heat transfer and temperature u...

CVD based oxide-metal multi structure for 3D NAND memory devices

Gas delivery systems and methods

Deposition radial and edge profile tunability through independent c...

Treatment for high-temperature cleans

Methods of forming hardmasks

Methods, systems, and apparatus for processing substrates using one...

Doping semiconductor films

Methods for producing high-density carbon films for hardmasks and o...

Methods for producing high-density, nitrogen-doped carbon films for...

Plasma enhanced deposition of silicon-containing films at low tempe...

Methods to reduce material surface roughness

Hydrogen management in plasma deposited films

Controlling concentration profiles for deposited films using machin...

Multiple spacer patterning schemes

Conformal halogen doping in 3D structures using conformal dopant fi...

Methods for modifying photoresist profiles and tuning critical dime...

Film formation via pulsed RF plasma

Hardmasks and processes for forming hardmasks by plasma-enhanced ch...

Methods for conformal doping of three dimensional structures

Patents Applicationslast 30 patents

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

PROCESSES FOR DEPOSITING SIB FILMS

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL RELATIVE TO METAL-...

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...

CARBON MOLD FOR DRAM CAPACITOR

METHODS OF FORMING THERMALLY STABLE CARBON FILM

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...

ELECTRICAL IMPROVEMENTS FOR 3D NAND

ION IMPLANTATION FOR REDUCED HYDROGEN INCORPORATION IN AMORPHOUS SI...

METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

MULTIPLE SPACER PATTERNING SCHEMES

SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL

SEAM-FREE GAPFILL DEPOSITION

METHODS, APPARATUS, AND SYSTEMS FOR MAINTAINING FILM MODULUS WITHIN...

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

PROCESSES FOR DEPOSITING SIB FILMS

TREATMENT FOR HIGH-TEMPERATURE CLEANS

METAL-DOPED BORON FILMS

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...

GAPFILL PROCESS USING PULSED HIGH-FREQUENCY RADIO-FREQUENCY (HFRF)...

PLASMA ENHANCED DEPOSITION OF SILICON-CONTAINING FILMS AT LOW TEMPE...

ACTIVELY COOLED FORELINE TRAP TO REDUCE THROTTLE VALVE DRIFT

HARDMASKS AND PROCESSES FOR FORMING HARDMASKS BY PLASMA ENHANCED CH...

METHODS OF FORMING HARDMASKS

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS