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Karuppanan Sekar
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Sheridan, MA, US
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last 30 patents
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Patent Grant
Cluster ion implantation for defect engineering
Patent number
7,919,402
Issue date
Apr 5, 2011
Semequip, Inc.
Dale C. Jacobson
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING
Publication number
20080299749
Publication date
Dec 4, 2008
Dale C. Jacobson
H01 - BASIC ELECTRIC ELEMENTS