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Katerina Ivanova
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Ilmenau, DE
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last 30 patents
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Patent Grant
Microsystem component with a device deformable under the effect of...
Patent number
8,128,282
Issue date
Mar 6, 2012
Universitaet Kassel
Ivo Rangelow
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MICROSYSTEM COMPONENT WITH A DEVICE DEFORMABLE UNDER THE EFFECT OF...
Publication number
20090213900
Publication date
Aug 27, 2009
Ivo Rangelow
B81 - MICRO-STRUCTURAL TECHNOLOGY