Katgenahalli Y. Ramanujam

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Belt wiper for a chemical mechanical planarization system
- Patent number 6,666,755
- Issue date Dec 23, 2003
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Interlocking chemical mechanical polishing system
- Patent number 6,475,332
- Issue date Nov 5, 2002
- Lam Research Corporation
- John Boyd
- B24 - GRINDING POLISHING