Katgenhalli Y. Ramanujam

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,690,966
- Issue date Apr 6, 2010
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,413,988
- Issue date Aug 19, 2008
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for heating polishing pad
- Patent number 6,896,586
- Issue date May 24, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for heating polishing pad
- Publication number 20030186623
- Publication date Oct 2, 2003
- Lam Research Corp.
- Xuyen Pham
- B24 - GRINDING POLISHING