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Katharina Gries
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Darmstadt, DE
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last 30 patents
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Patent Grant
Method and apparatus for examining a beam of charged particles
Patent number
11,961,705
Issue date
Apr 16, 2024
Carl Zeiss SMT GmbH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VALVES FOR CHARGED PARTICLE BEAM MICROSCOPE, VALVE MEMBER AND CHARG...
Publication number
20250029808
Publication date
Jan 23, 2025
Carl Zeiss MultiSEM GmbH
Steffen Balling
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
Publication number
20210110996
Publication date
Apr 15, 2021
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS