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Kathleen B. Gabriel
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Bethlehem, PA, US
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Patent Grant
Deep UV photoresist with alkyl 2-diazo-1-ones as solubility modific...
Patent number
4,959,293
Issue date
Sep 25, 1990
J. T. Baker, Inc.
George Schwartzkopf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY