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Kathleen D. Keay
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Franklin, MA, US
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last 30 patents
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Patent Grant
System and method for electronic diagnostics of a process vacuum en...
Patent number
7,289,863
Issue date
Oct 30, 2007
Brooks Automation, Inc.
Joseph D. Arruda
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
System and method for electronic diagnostics of a process vacuum en...
Publication number
20070043534
Publication date
Feb 22, 2007
Joseph D. Arruda
G01 - MEASURING TESTING