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Katrin Pietsch
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Solms, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for determining positions of structures on a substrate
Patent number
7,948,635
Issue date
May 24, 2011
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Grant
Device for measuring the position of at least one structure on a su...
Patent number
7,872,763
Issue date
Jan 18, 2011
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Apparatus and method for supporting a substrate at a position with...
Publication number
20090126525
Publication date
May 21, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Device for measuring the position of at least one structure on a su...
Publication number
20090128828
Publication date
May 21, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Method for determining positions of structures on a substrate
Publication number
20090109443
Publication date
Apr 30, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING