Katshiro Kobayashi

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Patents Grantslast 30 patents

Information Patent Grant
Photoresist undercoat-forming material and patterning process
- Patent number 7,632,624
- Issue date Dec 15, 2009
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...