Katsuaki NAKANO

Person

Susono-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus and sputtering method
- Patent number 11,384,423
- Issue date Jul 12, 2022
- ULVAC, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming internal stress control film
- Patent number 10,975,465
- Issue date Apr 13, 2021
- Ulvac, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode device and sputtering apparatus
- Patent number 10,934,616
- Issue date Mar 2, 2021
- Ulvac, Inc.
- Yukihito Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of, and apparatus for, forming hard mask
- Patent number 9,779,958
- Issue date Oct 3, 2017
- Ulvac, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-treated ceramic member, method for producing the same and v...
- Patent number 8,231,967
- Issue date Jul 31, 2012
- ULVAC, Inc.
- Katsuaki Nakano
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
CATHODE DEVICE AND SPUTTERING APPARATUS
- Publication number 20200377992
- Publication date Dec 3, 2020
- ULVAC, Inc.
- Yukihito TASHIRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING INTERNAL STRESS CONTROL FILM
- Publication number 20190071767
- Publication date Mar 7, 2019
- ULVAC, Inc.
- Katsuaki NAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180204729
- Publication date Jul 19, 2018
- Ulvac, Inc.
- Kazuhiro SONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF, AND APPARATUS FOR, FORMING HARD MASK
- Publication number 20150228496
- Publication date Aug 13, 2015
- ULVAC, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD MASK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20150107769
- Publication date Apr 23, 2015
- ULVAC, Inc.
- Katsuaki Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE-TREATED CERAMIC MEMBER, METHOD FOR PRODUCING THE SAME AND V...
- Publication number 20110151237
- Publication date Jun 23, 2011
- Ulvac, Inc.
- Katsuaki NAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Katsuaki NAKANO

Person

Patents Grantslast 30 patents

Sputtering apparatus and sputtering method

Method of forming internal stress control film

Cathode device and sputtering apparatus

Method of, and apparatus for, forming hard mask

Surface-treated ceramic member, method for producing the same and v...

Patents Applicationslast 30 patents

CATHODE DEVICE AND SPUTTERING APPARATUS

METHOD OF FORMING INTERNAL STRESS CONTROL FILM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

METHOD OF, AND APPARATUS FOR, FORMING HARD MASK

HARD MASK AND METHOD OF MANUFACTURING THE SAME

SURFACE-TREATED CERAMIC MEMBER, METHOD FOR PRODUCING THE SAME AND V...