Katsuaki SUGAWARA

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ready for rotation state detection device, method of detecting read...
- Patent number 10,002,417
- Issue date Jun 19, 2018
- Tokyo Electron Limited
- Kiichi Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing apparatus, plasma processing method, and recordin...
- Patent number 9,583,318
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Shigehiro Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND RECORDIN...
- Publication number 20160293390
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE...
- Publication number 20140345523
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
READY FOR ROTATION STATE DETECTION DEVICE, METHOD OF DETECTING READ...
- Publication number 20140347465
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Kiichi TAKAHASHI
- G06 - COMPUTING CALCULATING COUNTING