Katsuaki Takagi

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device, substrate processing method, and subst...
- Patent number 9,673,072
- Issue date Jun 6, 2017
- SCREEN Holdings Co., Ltd.
- Katsuaki Takagi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SUBST...
- Publication number 20160189991
- Publication date Jun 30, 2016
- SCREEN Holdings Co., Ltd.
- Katsuaki TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS