Katsuei HIGASHI

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,676,834
- Issue date Jun 13, 2023
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307258
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Katsuei HIGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200243350
- Publication date Jul 30, 2020
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- H01 - BASIC ELECTRIC ELEMENTS