Katsufumi Matsuki

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
- Patent number 10,037,901
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Kazuya Koyama
- B08 - CLEANING
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355647
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUT...
- Publication number 20240290607
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
- Publication number 20150328668
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Kazuya KOYAMA
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140373877
- Publication date Dec 25, 2014
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING