Katsuhiko Itoh

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Kokubunji, JP

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Patents Grantslast 30 patents

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Semiconductor cleaning and production methods using a film repulsin...
- Patent number 6,029,679
- Issue date Feb 29, 2000
- Hitachi, Ltd.
- Katsuhiro Ota
- B08 - CLEANING
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Removal method of organic matter and system for the same
- Patent number 5,747,387
- Issue date May 5, 1998
- Hitachi, Ltd.
- Koutarou Koizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Atmospheric pressure, elevated temperature gas desorption apparatus
- Patent number 5,482,524
- Issue date Jan 9, 1996
- Hitachi, Ltd.
- Kazuo Nakano
- G01 - MEASURING TESTING
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Method for monitoring thickness of epitaxial growth layer on substrate
- Patent number 4,203,799
- Issue date May 20, 1980
- Hitachi, Ltd.
- Katsuro Sugawara
- C30 - CRYSTAL GROWTH