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Katsuhiko Iwabuchi

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  • Sagamihara, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma electrode and plasma processing device
    • Patent number 10,600,621
    • Issue date Mar 24, 2020
    • Tokyo Electron Limited
    • Masato Morishima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method
    • Patent number 8,574,676
    • Issue date Nov 5, 2013
    • National University Corporation Nagaoka University of Technology
    • Kanji Yasui
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Load lock apparatus, processing system and substrate processing method
    • Patent number 8,196,619
    • Issue date Jun 12, 2012
    • Tokyo Electron Limited
    • Katsuhiko Iwabuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck for substrate stage, electrode used for the chu...
    • Patent number 7,916,447
    • Issue date Mar 29, 2011
    • Future Vision Inc.
    • Toshiki Kobayashi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Substrate processing device
    • Patent number 7,780,391
    • Issue date Aug 24, 2010
    • Tokyo Electron Limited
    • Takaaki Matsuoka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load lock apparatus, processing system and substrate processing method
    • Patent number 7,624,772
    • Issue date Dec 1, 2009
    • Tokyo Electron Limited
    • Katsuhiko Iwabuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,432,208
    • Issue date Aug 13, 2002
    • Tokyo Electron Limited
    • Satoru Kawakami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum processing method
    • Patent number 6,022,418
    • Issue date Feb 8, 2000
    • Tokyo Electron Limited
    • Katsuhiko Iwabuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer processing apparatus
    • Patent number 5,697,749
    • Issue date Dec 16, 1997
    • Tokyo Electron Kabushiki Kaisha
    • Katsuhiko Iwabuchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing apparatus
    • Patent number 5,462,397
    • Issue date Oct 31, 1995
    • Tokyo Electron Limited
    • Katsuhiko Iwabuchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heat-treatment apparatus
    • Patent number 5,407,350
    • Issue date Apr 18, 1995
    • Tokyo Electron Limited
    • Katsuhiko Iwabuchi
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Apparatus for treatment using gas
    • Patent number 5,016,567
    • Issue date May 21, 1991
    • Tel Sagami Limited
    • Katsuhiko Iwabuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents