Katsuhiko Kato

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Ichinomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin substrate transferring apparatus
- Patent number 6,234,738
- Issue date May 22, 2001
- MECS Corporation
- Kazuo Kimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning apparatus for a semiconductor wafer
- Patent number 5,365,672
- Issue date Nov 22, 1994
- MECS Corporation
- Katsuhiko Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer positioning apparatus
- Patent number 5,054,991
- Issue date Oct 8, 1991
- MECS Corporation
- Katsuhiko Kato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Seal structure for transfer robot
- Publication number 20050115351
- Publication date Jun 2, 2005
- AITEC CORPORATION
- Kazuo Kimata
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Arms of scalar robot
- Publication number 20020148320
- Publication date Oct 17, 2002
- AITEC Corporation
- Kazuo Kimata
- H01 - BASIC ELECTRIC ELEMENTS