Katsuhiko MIYA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,619,894
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Kitagawa
- B08 - CLEANING
Information Patent Grant
Vapor supplying apparatus, vapor drying apparatus, vapor supplying...
- Patent number 10,612,844
- Issue date Apr 7, 2020
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,586,693
- Issue date Mar 10, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Kato
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 10,286,425
- Issue date May 14, 2019
- SCREEN Holdings Co., Ltd.
- Yuta Sasaki
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,065,218
- Issue date Sep 4, 2018
- SCREEN Holdings Co., Ltd.
- Hiroaki Kitagawa
- B08 - CLEANING
Information Patent Grant
Vapor supplying apparatus, vapor drying apparatus, vapor supplying...
- Patent number 9,976,804
- Issue date May 22, 2018
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- F26 - DRYING
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 9,922,848
- Issue date Mar 20, 2018
- SCREEN Holdings Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 9,859,110
- Issue date Jan 2, 2018
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 9,728,396
- Issue date Aug 8, 2017
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,431,276
- Issue date Aug 30, 2016
- SCREEN Holdings Co., Ltd.
- Katsuhiko Miya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,214,331
- Issue date Dec 15, 2015
- SCREEN Holdings Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,111,966
- Issue date Aug 18, 2015
- SCREEN Holdings Co., Ltd.
- Hiroaki Kitagawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,857,449
- Issue date Oct 14, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 8,696,825
- Issue date Apr 15, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,623,146
- Issue date Jan 7, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,109,282
- Issue date Feb 7, 2012
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and a substrate processing method
- Patent number 8,075,731
- Issue date Dec 13, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, liquid film freezing method and sub...
- Patent number 8,029,622
- Issue date Oct 4, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,020,570
- Issue date Sep 20, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Takuya Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,964,042
- Issue date Jun 21, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Tomonori Kojimaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,942,976
- Issue date May 17, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,823,597
- Issue date Nov 2, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method dryi...
- Patent number 7,811,412
- Issue date Oct 12, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,767,026
- Issue date Aug 3, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of processing a substrate with processing...
- Patent number 7,722,736
- Issue date May 25, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 7,607,967
- Issue date Oct 27, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Kazuki Naoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,608,152
- Issue date Oct 27, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus
- Patent number 7,584,760
- Issue date Sep 8, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- B08 - CLEANING
Information Patent Grant
Substrate position correcting method and apparatus using either sub...
- Patent number 7,547,181
- Issue date Jun 16, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Eiji Fukatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method whic...
- Patent number 7,503,978
- Issue date Mar 17, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210090910
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180345328
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Hiroaki KITAGAWA
- B08 - CLEANING
Information Patent Application
VAPOR SUPPLYING APPARATUS, VAPOR DRYING APPARATUS, VAPOR SUPPLYING...
- Publication number 20180238621
- Publication date Aug 23, 2018
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180147609
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20170309472
- Publication date Oct 26, 2017
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170287700
- Publication date Oct 5, 2017
- SCREEN Holdings Co., Ltd.
- Masahiko KATO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170278726
- Publication date Sep 28, 2017
- SCREEN Holdings Co., Ltd.
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170213725
- Publication date Jul 27, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki KITAGAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20170043379
- Publication date Feb 16, 2017
- SCREEN Holdings Co., Ltd.
- Yuta SASAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160279679
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Hiroaki KITAGAWA
- B08 - CLEANING
Information Patent Application
VAPOR SUPPLYING APPARATUS, VAPOR DRYING APPARATUS, VAPOR SUPPLYING...
- Publication number 20160243461
- Publication date Aug 25, 2016
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20160074913
- Publication date Mar 17, 2016
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160059274
- Publication date Mar 3, 2016
- SCREEN Holdings Co., Ltd.
- Katsuhiko MIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20150273537
- Publication date Oct 1, 2015
- SCREEN Holdings Co., Ltd.
- Katsuhiko MIYA
- B08 - CLEANING
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20150255315
- Publication date Sep 10, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko MIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150020852
- Publication date Jan 22, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko KATO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150020850
- Publication date Jan 22, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Masahiko KATO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140174483
- Publication date Jun 26, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130167877
- Publication date Jul 4, 2013
- DAINIPPON SCREEN MFG. CO., LTD.
- Naozumi FUJIWARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130074873
- Publication date Mar 28, 2013
- Hiroaki KITAGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120186275
- Publication date Jul 26, 2012
- Masahiko Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120175819
- Publication date Jul 12, 2012
- Katsuhiko MIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20120090647
- Publication date Apr 19, 2012
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20120073599
- Publication date Mar 29, 2012
- Katsuhiko MIYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20100313915
- Publication date Dec 16, 2010
- Naozumi Fujiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND A SUBSTRATE PROCESSING METHOD
- Publication number 20090107400
- Publication date Apr 30, 2009
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090032067
- Publication date Feb 5, 2009
- Tomonori Kojimaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080254224
- Publication date Oct 16, 2008
- Takuya Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080189975
- Publication date Aug 14, 2008
- Katsuhiko Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080121251
- Publication date May 29, 2008
- Katsuhiko Miya
- B08 - CLEANING

Katsuhiko MIYA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Vapor supplying apparatus, vapor drying apparatus, vapor supplying...

Substrate processing apparatus and substrate processing method

Substrate cleaning method and substrate cleaning apparatus

Substrate processing method and substrate processing apparatus

Vapor supplying apparatus, vapor drying apparatus, vapor supplying...

Apparatus for and method of processing substrate

Substrate cleaning method and substrate cleaning apparatus

Substrate cleaning method and substrate cleaning apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and a substrate processing method

Substrate processing apparatus, liquid film freezing method and sub...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method dryi...

Substrate processing apparatus and substrate processing method

Apparatus for and method of processing a substrate with processing...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method

Substrate processing apparatus

Substrate position correcting method and apparatus using either sub...

Substrate processing apparatus and substrate processing method whic...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

VAPOR SUPPLYING APPARATUS, VAPOR DRYING APPARATUS, VAPOR SUPPLYING...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

VAPOR SUPPLYING APPARATUS, VAPOR DRYING APPARATUS, VAPOR SUPPLYING...

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND A SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD