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Annaka, JP
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last 30 patents
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Patent Grant
Apparatus for supplying granular raw material for a semiconductor s...
Patent number
5,462,010
Issue date
Oct 31, 1995
Shin-Etsu Handotai Co., Ltd.
Kiyotaka Takano
C30 - CRYSTAL GROWTH
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Patent Grant
Isolation valve for single crystal pulling apparatus
Patent number
5,356,113
Issue date
Oct 18, 1994
Shin-Etsu Handotai Co., Ltd.
Koji Mizuishi
C30 - CRYSTAL GROWTH